Nano-depth 3D shape microscopic inspection instrument
| No. | Item | Specification |
|---|---|---|
| 1 | Model | AE-100M-NS10 |
| 2 | Movement Stage (mm) | Platform: 150×150 / Travel: 85×60 |
| 3 | Z-Axis Travel Range | 33 mm (Manual Coarse Adjustment) |
| 4 | Tilting Stage | Dual-axis / Manual Adjustment |
| 5 | Sensor Resolution | 1600 × 1200 Pixels |
| 6 | Adapter Magnification | 1.0X |
| 7 | Objective Magnification | 10X / 20X / 50X |
| 8 | Observation / Measurement Range (mm) | 0.92×0.69 / 0.46×0.35 / 0.18×0.14 |
| 9 | Optical Resolution (µm) | 1.15 / 0.86 / 0.62 |
| 10 | Working Distance (mm) | 7.4 / 4.7 / 3.4 |
| 11 | Height Measurement Range | 100 µm (250 µm Optional) |
| 12 | Step Height Repeatability | < 0.1% (RSD calculated from 30 repeated measurements of a 10 µm standard step height in a VC-C vibration class environment) |
| 13 | Scanning Speed | Max. 1.2 µm/s |
| 14 | Light Source Type | White LED Light Box |
| 15 | Avg. Light Source Lifespan | 30,000 Hours |
| 16 | Intensity Adjustment | Auto / Manual |
*Measurement system modules can be sold separately.*
*Actual specifications are subject to final delivery.*
*Actual specifications are subject to final delivery.*