| 1 | System Dimensions | 2000(W) × 1500(D) × 1960(H) mm |
| 2 | Vacuum Chamber Specs | 1030(W) × 1100(D) × 1070(H) mm |
| 3 | Electrode Configuration | 17-Layer Parallel Plate Electrodes (944W × 790D mm / 28W × 24D in) |
| 4 | Control System | Industrial PC (IPC) + PLC Automatic Control |
| 5 | Vacuum Measurement | Pirani Resistance Vacuum Gauge |
| 6 | Gas Metering System | Precision Mass Flow Controller (MFC) |
| 7 | Gas Channels | 2–5 Channels (Optional): Ar, N2, H2, CF4, O2 |
| 8 | Plasma Generator | 10KW Plasma Power Source (40KHz; 13.56MHz Optional) |
| 9 | Process Gas Options | 2-Channel Selection: Ar, N2, H2, O2 |
