Floor-standing White Light Interferometer / WLI
| No. | Item | Technical Specifications |
|---|---|---|
| 1 | Model | CSG-A3535W |
| 2 | Overall Dimensions (mm) | 1300 × 830 × 1510 |
| 3 | Instrument Weight (kg) | 450 |
| 4 | Worktable Size (mm) | 480 × 430 |
| 5 | X/Y Axis Travel (mm) | 350 × 350 |
| 6 | Z-Axis Travel (mm) | 150 |
| 7 | X/Y Scale Resolution (µm) | 0.5 |
| 8 | Z-Axis Scale Resolution (µm) | 0.1 |
| 9 | Image Sensor | Monochrome Digital Camera |
| 10 | Sensor Resolution (pixel) | 1600 × 1200 |
| 11 | Objective Magnification | 10X / 20X / 50X |
| 12 | Field of View (mm) | 0.92×0.69 / 0.46×0.35 / 0.18×0.14 |
| 13 | Light Source Type | LED |
| 14 | Height Measurement Range (mm) | 2 |
| 15 | Step Height Repeatability (%) | < 0.5 (RSD calculated from 30 repeated measurements of a 10 µm standard step in a VC-C vibration-class environment) |
※ Specifications are subject to change without prior notice ※