Microwave Plasma Cleaning System
| No. | Technical Item | Specifications (Solid-State / Magnetron) |
|---|---|---|
| 1 | Technology Version | Solid-State Source / Magnetron Version |
| 2 | Output Power | 250W × 8 / 1.25kW × 2 |
| 3 | Output Frequency | 2400MHz - 2500MHz (Adjustable) / 2450MHz ± 25MHz |
| 4 | Frequency Accuracy/Stability | ± 50ppm / 1 - 2% |
| 5 | Microwave Leakage | ≤ 2mW/cm2 |
| 6 | Cooling Method | Water-Cooled |
| 7 | Process Gases | Ar, O2, H2, CF4, etc. |
| 8 | Plasma Treatment Area | 0.19m2 / 0.15m2 |