Floor-standing Color Confocal Microscope / Metrology System


Features

  • Large-range surface morphology contour size analysis, step height and width measurement
  • Can quickly generate 3D maps after measurement, and the viewing angle and scale of the 3D maps can be freely adjusted
  • The software has a real-time image window and an autofocus function, which can quickly observe the sample surface and set the measurement range
  • Can customize the editing, storage, and retrieval of measurement process files, greatly reducing manual operation costs
  • The software can automatically analyze the values ​​and automatically summarize and output the measurement summary table to facilitate batch product analysis and comparison.

Real-time Image
・Surface observation of the object under test
・Autofocus
・Cruise dragging movement
Parameter setting
・Equipment platform movement control
・Scan parameter setting
・Equipment information feedback
・Report display
Automated Measurement ・Customized programming effectively increases measurement efficiency and reduces operator programming time.
・Measurement tasks can be stored/read, improving measurement efficiency in the production process.
・Automatic numerical analysis


 
No.ItemTechnical Specifications
1ModelCSG-A3535CO
2Overall Dimensions (mm)1200 × 900 × 1620
3Instrument Weight (kg)450
4Worktable Size (mm)520 × 400
5X/Y Axis Travel (mm)350 × 350
6Z-Axis Travel (mm)150
7X/Y Scale Resolution (µm)0.5
8Z-Axis Scale Resolution (µm)0.1
9Line Length (mm)4.78 ± 0.02
10Working Distance (mm)39 ± 0.2
11Lateral Resolution (µm)25
12Spot Diameter (µm)10
13Measuring Angle (Degree)± 20
14Measuring Range (mm)3.9
15Axial Resolution (nm)320
16Accuracy (µm)1.2
※ Specifications are subject to change without prior notice ※