Features
- Large-range surface morphology contour size analysis, step height and width measurement
- Can quickly generate 3D maps after measurement, and the viewing angle and scale of the 3D maps can be freely adjusted
- The software has a real-time image window and an autofocus function, which can quickly observe the sample surface and set the measurement range
- Can customize the editing, storage, and retrieval of measurement process files, greatly reducing manual operation costs
- The software can automatically analyze the values and automatically summarize and output the measurement summary table to facilitate batch product analysis and comparison.
Real-time Image
・Surface observation of the object under test
・Autofocus
・Cruise dragging movement
Parameter setting
・Equipment platform movement control
・Scan parameter setting
・Equipment information feedback
・Report display
Automated Measurement ・Customized programming effectively increases measurement efficiency and reduces operator programming time.
・Measurement tasks can be stored/read, improving measurement efficiency in the production process.
・Automatic numerical analysis
| No. | Item | Technical Specifications |
|---|---|---|
| 1 | Model | CSG-A3535CO |
| 2 | Overall Dimensions (mm) | 1200 × 900 × 1620 |
| 3 | Instrument Weight (kg) | 450 |
| 4 | Worktable Size (mm) | 520 × 400 |
| 5 | X/Y Axis Travel (mm) | 350 × 350 |
| 6 | Z-Axis Travel (mm) | 150 |
| 7 | X/Y Scale Resolution (µm) | 0.5 |
| 8 | Z-Axis Scale Resolution (µm) | 0.1 |
| 9 | Line Length (mm) | 4.78 ± 0.02 |
| 10 | Working Distance (mm) | 39 ± 0.2 |
| 11 | Lateral Resolution (µm) | 25 |
| 12 | Spot Diameter (µm) | 10 |
| 13 | Measuring Angle (Degree) | ± 20 |
| 14 | Measuring Range (mm) | 3.9 |
| 15 | Axial Resolution (nm) | 320 |
| 16 | Accuracy (µm) | 1.2 |
※ Specifications are subject to change without prior notice ※